The SS21S8 is an electrochemical sensor designed for high-sensitivity detection of silane (SiH₄) within the 0–20 ppm range. It delivers an output signal of 300 ± 150 nA/ppm and responds within 50 seconds (T90), offering a resolution below 0.1 ppm and repeatability within ±5%. With low cross-sensitivity to interfering gases such as H₂, NO₂, PH₃, and CO, it ensures measurement accuracy even in complex environments. With an operating temperature range of -20℃ to +50℃ and a lifespan of more than 24 months in air, this sensor is ideal for fixed safety systems in the semiconductor industry.
